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> Upgraded gasonics aura 3010 for plasma asher stripper
Upgraded gasonics aura 3010 for plasma asher stripper
The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).
Combined with Allwin21 Corp advanced Robot control technology , Superior Temperature Control Technologyand AW Control Software ,upgraded Gasonics Aura 3010(Gasonics Aura 3000) provides significant advantages over the original systems.
l 3â€, 4â€, 5â€, 6†and 8â€wafer capability Use Equip robot wafer transfer instead of the Frog robot of the original, which will decrease the down time and low the wafer damage, particles greatly.
l Pentium PC computer equipped with DOS Windows.
l Interface control board with parallel connectors between PC computer and the Aura-3000 system
l New 16 bits A/D measurement system to replace original 12 bits A/D system to improve the accuracy of the measurements of gas flow, vacuum pressure, EOP, temperature of the wafer, etc. to improve the repeatability of the Asher process.
l New 14 bits D/A system to replace original old 8 bits D/A to improve the accuracy of the set point of the vacuum pressure, gas flow, etc.
l Add new RTP system to get more accuracy temperature control to improve the repeatability of the process. The new RTP system includes:(1)New lamp control system with new special solid-state relay control system. It is similar to the oven control system of the RTP machine(2)New zero crossing detects system. It is similar to the zero crossing detect of the RTP machine.(3)K-type thermocouple system with vacuum feed-through and amplifier to measure the temperature of the wafer. The thermocouple is touching the backside of the wafer directly.
l User-friendly recipe editor with gas flow set point, vacuum pressure set point, RF on or off set up, temperature setup etc.
l New GUI interface with curves display of the temperature, vacuum pressure, gas flow, RF status, EOP signal etc. during the process.
l Saved all process data on the local hard disk and send data to the server if it is needed (option).
l Saved all operation function, date, time and error message on the lot file.
l Wafer ID reading function to read wafer ID and use the wafer ID for the data ID to save the process data. Data saved with 4 layers: (1) directory (say year 2003,2004), (2) lot ID, (3) Date Time or step ID, (4) wafer ID. So it is easy to trace the data.
l Option for Bar code function for the lot ID, recipe ID selection.
l Manual and auto process running.
l System diagnostics for the quick diagnostic of the system
l Easier I/O set and checks function for the Maintenance.
l RTP function with temperature control ±2°C accuracy from 50 to 500°C with K-type thermocouple.
l Advanced accurate temperature control to make much better repeatability.
l All process data saved and easier for failure analyzer and process debug.
l “Exposed†I/O, A/D, D/A is easier for troubleshooting and maintenance.
l Tools would be painted and cleaned up
l Chamber would be re-anodized
